Shimadzu TMP-3203MC - Outside Drawing of TMP-3403 LMC

1.2 Descriptions
5
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
1
1.2.1.2 Outside drawing of TMP-3403LMC
Fig.1-3
TMP-3403LMC
INLET
FLANGE
Parts number ABCDE F
φG
K
φHn-φd
VG350 P/N 262-78503-52 287 294 270 375 420 22
φ450
360
φ420 12-φ15
ISO320B
Special
P/N 262-78503-53 287 294 270 375 420 22.5
φ425
360
φ395 12-φ13
VG300 P/N 262-78503-57 307 314 290 395 440 18.5
φ400
380
φ370 12-φ13
VG250 P/N 262-78503-58 331 338 314 419 464 18.5
φ350
404
φ320 12-φ13
F