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263-13236
○ Installation Precautions
Do not apply abnormal loads to the turbo molecular pump control cable plug and/or connector.
Abnormal loads may cause cable disconnection.
(1) Do not pull the turbo molecular pump control cable by the connector or plug.
(2) Do not allow any electrical cables to be in tension or to have very tight bending radii.
(3) Do not twist the turbo molecular pump control cable during connection.
○ Part Replacement
The lifetime of parts are specified as below.
The request for changing parts exceeding the estimated lifetime should be made to Shimadzu
or an approved service company in order for safety and adequate performance of the pump and
power supply unit.
Table 1 Estimated Part Life.
Parts List
Estimated Part Life
Cooling fan 5 years
240mm
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