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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
○ Air Cooled Turbo Molecular Pump
For the air cooled turbo molecular pumps, it is necessary to clean the cooling fan periodically
because of the cooling fan collecting dust, debris, etc. Shimadzu recommends removal of the
cooling fan for all methods of cleaning (compressed air, etc.) to prevent the particles, cleaning
debris, from accumulating in or on the turbo molecular pump. Please refer to Fig. 1 how to
change fan.
Fig. 1 How to Change the Cooling Fan Unit
○ Warranty period
12 months on new TMP's from the date of shipment from Shimadzu, or from any of its
worldwide sales offices.
○ Conditional warranty
During the warranty period and under normal operation, if the TMP fails to meet its product
specification due to defects in material and/or workmanship, Shimadzu will, at its discretion,
either repair it or exchange it with a new one for free.
○ Scope of the warranty
The warranty covers only TMPs, controllers and accessories sold by Shimadzu.
○ Warranty of repaired or replacement parts
In-warranty repaired or replacement parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the parts that have been repaired or replaced.
○ Exemption from the warranty
During the warranty period, Shimadzu will charge for repair or exchange in the following cases:
1) Failure caused by natural disasters or fire.
2) Failure or functional deterioration due to the following:
a) Pumping of special gases and materials
b) Ingestion of foreign objects through the TMP's protective net
c) TMP is operated differently than what is prescribed in the instruction manual
Pump model Parts name Parts Number
TMP-3203M
TMP-3203MC
Cooling unit
DV24V
262-76043-01
CONNECTOR
COOLING UNIT
SCREW
FLOW
PUMP
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