5.3 Interlock for Vacuum System
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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
5
5.3 Interlock for Vacuum System
(1) When using, as a backing vacuum pump, a vacuum pump with no check mechanism
(backstream flow prevention) such as dry vacuum pump, etc., install a forevacuum valve
between the turbo molecular pump and the backing vacuum pump to prevent rapid inverse
flow of exhausted gas. And close the forevacuum valve before the backing vacuum pump
stops. (See Fig. 5-4)
(2) Even when "ALARM" signal is emitted, don't cut off the power supply while "ROTATION"
signal is being emitted. Even when ALARM lamp lights, don't cut off the power supply while
ROTATION lamp lighting.
(3) If "ALARM" signal is emitted or ALARM lamp lights, shut down the backing vacuum pump
or close the forevacuum valve immediately. Furthermore, when main valve is installed
between the turbo molecular pump and the vacuum chamber, close this valve, too.
Provide a flowmeter on the downstream of cooling water line, otherwise the turbo molecular
pump will shut down and otherwise set up the interlock which the pump can not start against
cut off of water supply.
For more information regarding signals, please refer to the Power Supply Unit Instruction
Manual.
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