5.1 Installation
21
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
5
5.1.2.1 Installation of series of TMP-3203
Please fix the inlet flange of turbo molecular pump to the flange of vacuum chamber , and the
base bottom of the pump to the frame of the device by the bolts of regulated grade, size, number,
and tightening torque for each flange. (Refer to Table 5-1 and Table 5-2)
When you fix the pump, use all of the bolt holes of the inlet flange of the pump.
When you connect piping and the valve, etc. between the vacuum chamber and the turbo
molecular pump
，please fix all the bolt holes to those connection points by the method of fixing
the recommendation shown in Table 5-1and Table 5-2.
Fixed both by the inlet flange and the base of TMP
Fixed only by the inlet flange of TMP
Fig. 5-3 Installation of series of TMP-3203
Table 5-1 The recommended fixing bolt
(Note ) The special washers are attached to the inlet flange of TMP when shipping.
Do not remove them at the time of TMP installation.
Refer to Fig. 5-4 for the details of the bolt attaching part.
Description Rapid Shutdown Torque
TMP-3203M/MC/LM/LMC
59,100 N
・
m
Fixing method Both by the inlet flange and the base (recommended method)
Inlet flange VG350 VG300
ISO320B
Special
VG250
Bolt Size,
Quantity
Inlet flange
M12，12PC
Base
M16，8 PC
Material stainless steel
Grade
A2-70（JIS B 1054）
Washer
Plain washer and
spring lock washer
Special washer (Note) and spring lock washer
Fixing method Only by the inlet flange
Inlet flange VG350 VG300
ISO320B
Special
VG250
Bolt Size,Quantity
M12，12PC
Material stainless steel SCM435 (JIS G 4105) or equivalent
Grade
A2-70（JIS B 1054）
12.9 (JIS B 1051)
Washer
Plain washer and
spring lock washer
Special washer (Note) and spring lock washer
VACUUM
CHAMBER
OUTSIDE
DEVICE
INLET
FLANGE
Rods whitch have the
sufficient torque
strength.
DEVICE
FRAME
BASE
BOTTOM
RAPID SHUTDOWN
TORQUE
VACUUM
CHAMBER
OUTSIDE
DEVICE
INLET
FLANGE
RAPID SHUTDOWN TORQUE
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