5.1 Installation
25
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
5
Connection of Cooling Water Line:
Connect cooling water pipes to these pumps. When connecting the cooling water pipes, screw
the pipe joint while also holding the nozzle of the pump with a spanner in order to avoid deforming
the cooling water pipe, as illustrated in Fig. 5-7.
Fig. 5-7 Cooling Water Piping Connection
5.1.4 Center of gravity of the pump
The center of gravity of the pump is shown in Fig. 5-8. Fix securely to avoid moving or falling
down in the event of an earthquake.
Series of TMP-3203 TMP-3403LMC
Fig. 5-8 Center of gravity of the pump
PIPE JOINT
155ｍｍ
156ｍｍ
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