4.1 Pump Main Unit
15
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
4
4.1.2 Specification of TMP-3403LMC
(Note 1) mL/min : volume flow rate at 0 ℃ , 1 atm. (Compatible with SCCM.)
(Note 2) Without a protective net. Pumping speed for N
2
is 3000 L/s with a protective net.
(Note 3) The outlet flange of the turbo molecular pump should face horizontally or vertically
when installing the pump horizontally and obliquely.
(Refer to 5.1.1「Pump Mounting Direction」)
(Note 4) VG300, VG250 and ISO320B Special are also available.
Turbo molecular pump model TMP-3403LMC
Cooling method Water
Ultimate pressure 10
-7
Pa order
Maximum Argon through put
(Note 1)
2200 mL/min
Maximum allowable inlet pressure
(Nitrogen gas)
10 Pa
Maximum allowable outlet
pressure
270 Pa
Pumping speed N
2
（Note 2） He
H
2
3300 L/s
3100 L/s
2400 L/s
Compression ratio N
2
He
H
2
1 × 10
9
1 × 10
5
6 × 10
4
Rated speed 22020 rpm
Start-up time 15 minutes
Mounting position
In any desired direction（Note 3）
Bake-out temperature at an inlet
flange
120 ℃ or less
Vibration level (by Shimadzu's
method)
0.01 μm or less (0-peak)
Inlet flange
VG350（Note 4）
Outlet flange KF40
Mass 70 kg
Admissible throughput of purge
gas
20 to 30 mL/min（Note 1）
Admissible pumping speed of
backing vacuum pump in case of
gas purge
1500 L/min or more
Environmental Temperatures
Operation : 0 to 40 ℃ / Storage : -25 to 70 ℃
Admissible ambient magnetic field
Radial direction
Axial direction
3 mT
15 mT
Water Flow rate
Pressure
Temperature
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ℃
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