SECTION 1 OUTLINE AND DESCRIPTIONS
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1.1 Outline
The turbo molecular pump is a vacuum pump. The turbo molecular pump is used with a
backing vacuum pump to create a high vacuum in a vacuum chamber.
Typical Applications ; Semiconductor equipments,
Industrial equipments,
R&D applications,
The other ultra high vacuum applications.
The turbo molecular pump (one standard set) consists of the following items.
・Pump 1
・Power Supply Unit 1
・Control Cable 1
・Motor Cable 1
・Standard Accessories 1 Set
This instruction manual explains the operation of the pump unit. For more detailed instructions
regarding the power supply unit, please refer to the Power Supply Unit Instruction Manual.
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