SECTION 6 OPERATION
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6
6.5 Baking Operation
CAUTION
During baking operation, cool down the turbo molecular pump in either cooling water or cooling
fan.
NOTICE
Baking temperature is not allowed to exceed 120 ℃ .
The baking heater is installed near the inlet flange.
Fig. 6-1 Installation of Baking Heater
Perform baking treatment when the inlet pressure of the turbo molecular pump is 1x10
-3
Pa or
less. It is necessary to apply baking to not only the vacuum chamber but also the pump proper
in order to keep an exhausting vessel at super high vacuum. However, the baking temperature
is not allowed to exceed 120
℃ because generally the rotor of the turbo molecular pump is made
of aluminum alloy.
For baking application to the pump proper, carefully adjust the baking temperature. For the
purpose, special heater is supplied with the pump system considering the temperature
requirements. Use this heater for control of the baking temperature.
BAKING HEATER
INLET FLANGE
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