Shimadzu TMP-3203LM User Manual

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Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
Introduction
Thank you for choosing the turbo molecular pump made by Shimadzu Corporation.
(hereafter referred to as "turbo molecular pump").
Please read the instruction manual carefully in conjuction with the instruction manual of
"Power Supply Unit" before using turbo molecular pump, and save the instruction manual for
future reference.
Copyrights and Disclaimers
This document is copyrighted by Shimadzu Corporation. Please refrain from reproducing
or copying part or all of this document without permission from Shimadzu.
In an effort to improve the product, this document may be revised in the future without
notice.
Every effort has been made to prepare an accurate and complete manual, but if an error
or omission should be discovered, revisions might not be possible immediately.
Shimadzu does not take responsibility for any effects that may result from the use of this
manual.
Copyright 2003-2006 Shimadzu Corporation.All rights reserved.
©

Shimadzu TMP-3203LM Specifications

General

Brand	Shimadzu
Model	TMP-3203LM
Category	Water Pump
Language	English