SECTION 4 SPECIFICATIONS
14
263-13236
4
4.1 Pump Main Unit
4.1.1 Specification of series of TMP-3203
(Note 1) When using a metal gasket at the inlet flange. When using an o-ring gasket , the
ultimate pressure is 10
-7
Pa order.
(Note 2) mL/min : volume flow rate at 0 ℃ , 1 atm. (Compatible with SCCM.)
(Note 3) Without a protective net. Pumping speed for N
2
is 2950 L/s with a protective net.
(Note 4) The outlet flange of the turbo molecular pump should face horizontally or vertically
when installing the pump horizontally and obliquely.
(Refer to 5.1.1「Pump Mounting Direction」)
(Note 5) VG300, VG250 and ISO320B Special are also available.
Turbo molecular pump model TMP-3203M TMP-3203MC TMP-3203LM TMP-3203LMC
Cooling method Cooling fan Water
Ultimate pressure (Note 1) 10
-9
Pa order 10
-8
Pa order 10
-9
Pa order 10
-8
Pa order
Maximum Argon gas through put
(Note 2)
250 mL/min 400 mL/min 1200 mL/min 2200 mL/min
Maximum allowable inlet pressure
(Nitrogen gas)
0.4 Pa 40 Pa
Maximum allowable outlet
pressure
40 Pa 270 Pa
Pumping speed N
2
（Note 3） He
H
2
3200 L/s
3000 L/s
2400 L/s
Compression ratio N
2
He
H
2
1 × 10
9
or more
3 × 10
5
1 × 10
4
Rated speed 21000 rpm
Start-up time 13 minutes
Mounting position
In any desired direction（Note 4）
Bake-out temperature at an inlet
flange
120 ℃ or less
Vibration level (by Shimadzu's
method)
0.01 μm or less (0-peak)
Inlet flange
VG350（Note 5）
Outlet flange KF40
Mass 70 kg
Admissible throughput of purge
gas
20 to 30 mL/min（Note 2）
Admissible pumping speed of
backing vacuum pump in case of
gas purge
1500 L/min or more
Environmental Temperatures
Operation : 0 to 40 ℃ / Storage : -25 to 70 ℃
Admissible ambient magnetic field
Radial direction
Axial direction
3 mT
15 mT
Water Flow rate
Pressure
Temperature
N/A
2 to 4 L/min
0.2 to 0.5 MPa
5 to 25 ℃
To Next Page
Loading...
Need help?
General
