Excerpt from No. FE8A-0049F
Declaration of Conformity
SHIMADZU CORPORATION SEMICONDUCTOR EQUIPMENT DIVISION
Address :380-1,HORIYAMASHITA,HADANO-CITY,
KANAGAWA, 259-1304, JAPAN
as the Manufacturer
declares in sole responsibility that the following product
Product Name Turbo Molecular Pump
Model name , P/N
Vacuum Pump Power Supply
Model name P / N Model name P / N
TMP-3203LM/LMC/M/MC
262-78430-xx
EI-D3203M
262-78685-xx
TMP-3403LM/LMC/M/MC
262-78503-xx
EI-D3403M
262-78694-xx
Note: –xx (P/N）means 00 to 99 or blank
referred to in this declaration conforms with following directives and standards
Machinery directive 98/37/EC amended by 98/79/EC
EN292-1:1991, EN292-2:1991+A1:1995,
EN1012-2:1996
Low Voltage directive 73/23/EEC amended by 93/68/EEC
EN61010-1:1993+A2:1995
EN61010-1:2001
EMC directive 89/336/EEC amended by 91/263/EEC, 92/31/EEC, 93/68/EEC, 93/97/EEC
EN61326:1997+A1:1998+A2:2001, class A
Note 1) This declaration becomes invalid if technical or operational modifications are
introduced without manufacturer’s consent.
Note 2) This declaration is valid if this product is used alone or in combination with the
accessories of this product or other instruments which fulfill with the
requirement of mentioned directive.
Note3) Importer/Distributor and Authorized Representative in EU is as follows:
KRATOS ANALYTICAL LTD.
Address :
Whartisid, Trafford Wharf Road, Manchester M17 1GP England
Hadano, JAPAN 3 April 2003
place and date of issue signature
Shinzo Inoue
name
Manager of Quality Assurance Dept.
Semiconductor Equipment Division
Shimadzu Corporation
Position
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