Gas Mass Flow Meter
with MEMS calorimetric sensing technology
MF / FS 4000 Series
User Manual
Document No. 06-2021-FM1 EN
Issue date: 2021.06
Revision: VC.1
Siargo Ltd.
3100 De La Cruz Boulevard, Suite 210
Santa Clara, CA 95054
USA
Tel: +1(408)969.0368
Email: info@siargo.com
© Copyright 2021 by Siargo Ltd.
Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions
without prior notice. For further information and updates, please visit: www.Siargo.com
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