1. Overview
All contact information can be found at the end of this manual.
This manual provides essential information for the operation of the MF/FS4000 series of gas mass
flow meter/sensors for general-purpose gas flow monitor and control applications with the full-scale
mass flow rate from 2 to 50 SLPM with both analog and digital outputs. The product performance,
maintenance, and trouble-shooting as well as the information for product order, technical support,
and repair are also included.
MF/FS4000 mass flow meters/sensors are designed for general purpose precise industrial gas
processing monitor and/or control. It can be applied for medical equipment such as anesthesia
application, endoscope, and cancer treatment; industrial applications including welding machine,
laser equipment, gas mixture; and many more. The series covers a wide dynamic flow range with a
working pressure rating of up to 0.5 MPa (5 bar or 73 PSI), and a compensated temperature ranging
from -10 to 55°C.
The products are designed with an easy change of mechanical connectors. The standard connectors
are BSPT 1/4”, and other customized ones are available upon request.
The products are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together
with smart control electronics. The sensor surface is passivated with silicon nitride ceramic materials
together with a water/oil proof nano-coating for performance and reliability.
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