Operations Model 6DS-SP Planarizer
5 - 2 Version 4.0 - February 1998
OVERVIEW 6
ALARM LOG MENU 8
Function Key Choices Available at the Alarm Log Menu 10
FREQUENTLY ENCOUNTERED PROBLEM CONDITIONS 11
Machine Won’t Power Up 12
Machine Won’t Home 13
Cycle Won’t Start--Part A 14
Cycle Won’t Start--Part B 15
Power Goes Off During Cycle 16
Machine Halts During Cycle with Power Still on but Motion Suspended - Part A 16
Machine Halts During Cycle with Power Still on but Motion Suspended - Part B 18
Water Sprayer Won’t Spray 19
Elevator Tanks Won’t Hold Water 20
Wafers Left on Table - Part A 21
Wafers Left on Table - Part B 22
Wafers Break During Polish Cycle - Part A 22
Wafers Break During Polish Cycle - Part B 24
Carriers Drop Off Spindles 25
Robot Drops Wafers--Part A 26
Robot Drops Wafers--Part B 27
Software (Computer) problems 29
No Response from Keyboard or No Response from Machine--Part A 29
No Response from Keyboard or No Response from Machine--Part B 30
ERROR MESSAGES AND ALARMS 31
“LEFT SPINDLE FORCE LOW ALARM” - # 1 32
“LEFT SPINDLE FORCE HIGH ALARM” - # 2 32
“RIGHT SPINDLE FORCE LOW ALARM” - # 5 32
“RIGHT SPINDLE FORCE HIGH ALARM” - # 6 32
“LEFT SPINDLE FORCE LOW ALARM” - # 1 33
“LEFT SPINDLE FORCE HIGH ALARM” - # 2 33
“RIGHT SPINDLE FORCE LOW ALARM” - # 5 33
“RIGHT SPINDLE FORCE HIGH ALARM” - # 6 33
“LEFT SPINDLE SPEED LOW ALARM” - # 3 34
“LEFT SPINDLE SPEED HIGH ALARM” - # 4 34
“RIGHT SPINDLE SPEED LOW ALARM” - # 7 34
“RIGHT SPINDLE SPEED HIGH ALARM” - # 8 34
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