Maintenance Model 6DS-SP Planarizer
iv Version 4.0 - February 1998
Chapter 2Installation 2-1
Overview 3
Summary 3
Step 1 - Obtain the Facility and Equipment Preparation Sign-Off
Sheet 4
Step 2 - Unpacking and Inspection 5
Preparation for Installation 5
Step 3 - Machine Placement 6
Step 4 - Leveling 7
Leveling Requirement 7
Leveling Feet 7
Step 5 - Confirming that Utility Sources Meet Requirements 8
General Facilities and Electrical Service Data Sheet 9
Step 6 - Connecting Utilities 11
Electrical 13
Compressed Air 14
Vacuum and D.I. Water 14
Vacuum System 14
Vacuum Separator 15
Exhaust 15
Temperature-Controlled Water 15
Temperature Control Unit 15
Drains 16
Step 7 - Slurry System Connection 17
Step 8 - Completing the Installation - Initial Adjustments 19
Chapter 3 Physical Description 3-1
OVERVIEW 3
CABINETRY 4
Interlock Safety Switches 4
Service Door Interlocks 4
Operator Door Interlocks 5
PLANARIZER SUBASSEMBLIES 12
CONTROL PANEL AND EMERGENCY OFF BUTTONS 15
Control Panel 15
Additional Emergency Off Buttons 17
CONTROL COMPUTER 18
Where to Find More Information on the Software... 18
Where to Find More Information on the Control Computer System... 18
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