Strasbaugh Table of Contents
Version 4.0 - February 1998 v
Flat Panel Display Operator Interface, Keypad, and Keyboard 19
Keypad and Keyboard 19
Menus 20
Chapter 4 Mechanical Description 4-1
Overview 3
Auto Polish Cycle Operation - The Sequence of Events 3
A. Cassette Loading 3
B. Wafer Loading Sequence 4
C. Polish Cycle Sequence 5
D. Wafer Unloading Sequence 6
E. Cassette Removal 7
F. Cycle Halt 7
Bridge Drive Assembly 8
Elevator Assembly 9
Robot Assembly 11
Left/Right Load/Unload Stations 12
Left/Right Carrier/Wafer Cleaning Stations 12
Shuttle Assembly 13
Polish Table Drive Assembly 13
Spindle Drive Assembly 14
Spindle Down Force Assembly 16
Conditioning Arm Down Force Assembly 17
Chapter 5 Control System Description 5-1
Control Computer 3
Servo Controller 4
DC Motor Controller 5
Servo Amplifier 5
I/O and Interface System 6
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