Maintenance Model 6DS-SP Planarizer
11 - 2 Version 4.0 - February 1998
Overview 3
Cleaning Stations 4
Cleaning Stations Adjustment Series--Order of Adjustment 4
Cleaning Station Device Up/Down Adjustments
[#2 in Cleaning Stations Adjustment Series] 5
Cleaning Station Pad Pressure Adjustments
[#4 in Cleaning Stations Adjustment Series] 8
Conditioning Arm 11
Conditioning Arm Adjustment Series--Order of Adjustment 11
Conditioning Arm Pressure
[#2 in Conditioning Arm Adjustment Series] 12
Conditioning Device Air Cylinder Adjustment
[#3 in Conditioning Arm Adjustment Series] 16
Load Stations 19
Load Chuck Raise Pressure 19
Left Load Chuck Raise Pressure 19
Right Load Chuck Raise Pressure 22
Shuttle 23
Shuttle Flow Control Adjustments 23
Slurry System 27
Slurry Diaphragm Pump Pressure 27
Spindles 29
Spindle Move Down Speed 29
Spindle Carrier Blow Off Pressure 33
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