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Ulvac DAU-20 - Maintenance, Inspection, and Repair; Cautions for Maintenance, Inspection, and Repair; Maintenance; Regular Inspections

Ulvac DAU-20
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7
6. Maintenance, Inspection, and Repair
6.1. Cautions for Maintenance, Inspection, and Repair
See Danger (3), P03
See Warning (4)(18)(19), P04
See Caution (10)(11)(12)(13), P06
See Note (17), P07
Maintenance and repair by the customer’s repair technician is limited to the following procedures.
Do not undertake other repairs, or make modifications other than the standard options supplied by
the manufacturer.
1) Replacing diaphragms
2) Replacing valves
6.2 Maintenance
The following checks are required at least once every three days during operation.
(1) Check for abnormal noises.
(2) Check for abnormal heating of the pump.
(3) Check that gas is discharged normally.
If a problem is found, take the measures described in 6.5 Troubleshooting List.
6.3 Regular Inspections
Inspect consumables after the first 6000 hours of operation, and replace and clean in accordance
with the Replacement and Cleaning Guide on the following page. Refer to 6.4 Replacing and
Cleaning Consumables for procedures.
Request replacement by the manufacturer’s service division if a repair technician is not available.
Table.2 Consumables List
Description
Qty
Material
Life expectancy
Diaphragm
4
Main body: Synthetic rubber EPDM
Parts exposing to gas: PTFE
6,000 hr
Valve
6
Fluorine Rubber
6,000 hr
Open hold valve
2
Bearing
1 set
―――
15,000 hr
Note that the average life for a component varies with the conditions of use.
Always follow 4.1 Cautions for Operation, and remember that life is extended by running the
pump at minimal load (running the pump at minimal load is operation at the achieved pressure
(inlet closed)).
Bearings are replaced by the manufacturer’s service division.
Danger
Warning
Caution
Note

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