Ulvac DAU-20 - Replacement of Diaphragms and Valves

9
1) Replacement of Diaphragm and Valves.
It is recommended to replace all sheets at the same time.
Caution : When working on replacement, wear gloves always. There is risk of injury.
(4)Connecting
pipe
(Upper and lower)
(3) Valve retainer
(2) Valve retainer cover
(1) Panel (Both sides)
(7) Casing cover
(5)Handle
(6) Opposite side 13 mm(0.5") spanner
insertion Openings,4 positions