Ulvac DAU-20 - Replacing and Cleaning Consumables

8
<Replacement Guide>
Replace or clean components if performance is reduced or the following symptoms become
apparent.
Table.3 Locations for Maintenance and Inspection
Period
of operation
Inspection item
Replacement guidelines
Method of
inspection
3,000 hr
Diaphragm
Peel off or wear of PTFE area
Rubber deformation hardening,
or crack, etc.
Visual inspection
Valve
Open hold valve
Rubber deformation hardening,
or crack, etc.
Visual inspection
Bearing
Allophone
Auscultation
6.4 Replacing and Cleaning Consumables
See Warning (19), P04
See Caution (11)(12), P06
※ The pump becomes very hot after operation. After stopping the pump, leave it
for 30 minutes to cool, and replace and clean components only after it has
cooled to a safe temperature.
※ Always put on dust mask and gloves before replacing diaphragms and valves.
Any fine particles produced by mechanical wearing may become airborne
causing a health risk if inhaled.
※ Always use gloves to prevent injury when replacing diaphragms.
※ Confirm whether you do not absorb hazardous solvent for the human
body. When it is hazardous, do not conduct disassembly work definitely.
Prepare the following tools and refer to drawing when working replacement. When having
difficulty in preparing the tools, ask Ulvac Service Section.
Tools to be used:
1, Phillips screwdriver: No. 2
2, Torque driver (plus) set tightening torque to 4N∙m
3, Spanner: (1)Opposite sides 13 mm (0.5") (thickness lower than 5.5 mm (0.2")),
(2)Torque spanner (4N·m) ,(3)Opposite sides 17 mm (0.7")
4, Wipe off solvent: Chemical without influence to rubber parts such as ethyl alcohol.
5, Paper (paper rags)
※Wipe off the dirty parts with No.4 and No.5.
Caution: Before replacing consumable parts, be sure to turn OFF the power.
Warning
Caution