Ulvac DAU-20 - Page 3

6. Maintenance, Inspection, and Repair ................................................. 7
6.1 Cautions for Maintenance, Inspection, and Repair ................................ 7
6.2 Maintenance ................................................. 7
6.3 Regular Inspections ................................................. 7
6.4 Replacing and Cleaning Consumables ................................................. 8
1) Replacement of Diaphragms and Valves ............................................. 9
2) Replacement of Bearing ............................................... 12
6.5. Troubleshooting List ............................................... 13
7. In Conclusion ............................................... 14
Warranty ............................................... 14
Usage Status Check Sheet
Figures and Tables
Fig.1 DAU-20 Dimensions ............................................... 3
Fig.2 Change region of the voltage and frequency ................................... 4
Fig.3 Example of Piping Used When Evacuating a Vessel ....................... 5
Fig.4 Exploded view ............................................... 10
Table 1 Specifications ............................................... 1
Table 2 Consumables List ............................................... 7
Table 3 Locations for Maintenance and Inspection ................................... 8
Table 4 Troubleshooting List ............................................... 13