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Ulvac G-100D - Page 31

Ulvac G-100D
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-21-
Table 4 Periodic inspection table
Frequency Item
Details Measures
Once/3
days
Oil Amount Refill the oil.
Color (Reddish brown, dark blown,
and cloudy white are not good.)
Replace the oil.
Sound Abnormal sound
Check nuts and bolts for
looseness. If not clear, contact us.
Vibration Abnormal vibration
Current
value
Difference from the rated value Check the cause of an overload.
If not clear, contact us.
Once/week
Surface
temperature
Surface temperature
(The temperature higher than the
room temperature by 45 or more
is abnormal.)
Check the cause of an overload.
If not clear, contact us.
Oil leakage
Oil leakage from the shaft seal
section and plugs.
Replace seals, or contact us.
Once/3,000
operation
hours or
once/6
months
Inlet filter Clogged with dust Clean the inlet filter.
Oil
Even if no problem is recognized,
be sure to replace the oil.
Replace the oil.
Once/year Coupling Damage or fracture Replace the coupling.
Oil pump
filter
Clogged with dust Clean the oil pump filter.
2) Inspection of the amount of pump oil
Refill the pump oil so that the pump oil level is kept within the range of the red lines
showing the upper and lower limits on the oil level gauge during operation.
3) Inspection of oil leakage
When oil leaks from the shaft seal section or drain plug seal section, repair is required. Our
specified O-rings and seals are always available from the service departments shown at the
back of this manual. When necessary, contact them.
4) Inspection of inlet filter
If the inlet filter is clogged with dust included in the evacuated gas, the pump’s efficiency
may deteriorate.
5) Inspection of abnormal sounds and vibration
Check the nuts and bolts for looseness.

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