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Problem Cause Measures Reference
The pressure
does not
decrease.
⑥ The specified amount of oil has not
been added.
⑥ Add the specified amount of oil. 3.2
⑦ The oil has deteriorated. ⑦ Replace the oil. 6.3
⑧ Leakage occurs from the pipe
connected to the pump.
⑧ Locate the leakage with a leakage
detector and stop the leakage.
⑨ Our specified oil is not being used. ⑨ Overhaul the pump and replace
with oil specified by us
6.3
⑩ Oil does not circulate, or the oil
hole of the cover is clogged.
⑩ Overhaul and clean the oil hole.
Abnormal
sound is
generated.
① Problem with power supply voltage ① Set the power supply voltage to
within ±10% of the rated voltage.
3.5
② The motor malfunctions. ② Replace the motor.
③ Foreign matter has entered the
pump.
③ Eliminate the foreign matter and
overhaul the pump.
④ The specified amount of oil has not
been added.
④ Add the specified amount of oil. 3.2
⑤ Oil does not circulate, or the oil
hole of the cover is clogged.
⑤Overhaul and clean the oil hole.
⑥ Components inside the pump have
burnt out.
⑥ Overhaul (replace the damaged
components).
Pump surfaces
are extremely
hot (50 ℃ or
more higher
than the room
temperature)
① Continuous operation at high
evacuation pressure
① A pump is suspended or suction
pressure is set to 1kPa or less.
② The specified amount of oil has not
been added. (If the oil amount is not
sufficient, the cooling effect of the
pump will be reduced.)
② Add the specified amount of oil. 3.2
③ The temperature of the evacuated
gas is high.
③ Mount cooling equipment such as a
gas cooler at the inlet side.
④ Oil does not circulate, or the oil
hole of the cover is clogged.
④ Overhaul and clean the oil hole.
A lot of oil
splashes out
from the outlet
port.
① The pump is been filled in excess of
the specified amount.
① Discharge the oil until it reduces to
the specified amount.
3.2
② Continuous operation is performed
at a high evacuation pressure.
② Install an oil mist trap at the outlet
side.
4.8
The oil leaks
outside the
pump.
① Deterioration of the O-ring and the
oil seal of the case and cover
① Check and replace the O-ring and
oil seal.
6.2
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