Ulvac GHD-101A - Page 10

Contents-3
8．Maintenance parts ・・・・・・・・・・ 28
8.1 Maintenance parts list ・・・・・・・・・・ 28
8.2 Disassembly drawings ・・・・・・・・・・ 29
Warranty
Safety data sheet (SDS)
Conditions of Use Check Sheet (disassembly repair)
Sales and Service Contact Addresses
Tables and figures
Fig. 1 GHD-101 Sealed rotary vacuum pump dimension drawings ・・・・・・・・・・ 4
Fig. 2 How to move the sealed rotary vacuum pump ・・・・・・・・・・ 5
Fig. 3 Establishing an exhaust ・・・・・・・・・・ 6
Fig. 4 Vacuum chamber and basic piping connections ・・・・・・・・・・ 7
Fig. 5 Wiring drawings ・・・・・・・・・・ 8
Fig. 6 Power cord consent (Inlet EN60320-1) ・・・・・・・・・・ 8
Fig. 7 How to attach the fastener and electric cord ・・・・・・・・・・ 9
Fig. 8 Fluctuations in the power supply voltage and frequency ・・・・・・・・・・ 11
Fig. 9 Exhaust velocity curve ・・・・・・・・・・ 19
Fig. 10 Adding oil to the sealed rotary vacuum pump ・・・・・・・・・・ 24
Fig. 11 GHD-101 Sealed rotary vacuum pump disassembly drawings ・・・・・・・・・・ 29
Table 1 Pump performance ・・・・・・・・・・ 3
Table 2 Motor performance ・・・・・・・・・・ 4
Table 3 Electric cord selection criteria ・・・・・・・・・・ 9
Table 4 Thermal protector characteristics ・・・・・・・・・・ 14
Table 5 Periodic inspection table ・・・・・・・・・・ 22
Table 6 Trouble checklist ・・・・・・・・・・ 25
Table 7 GHD-101 Maintenance parts list ・・・・・・・・・・ 28
Annex. Safety data sheet (SDS)