Ulvac GHD-101A - Disposal; 7. Disposal guidelines

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７．Disposal
Ensure that the pump is disposed of in accordance with national legislation, and as
required by your local authority.
(1) Engage the services of a specialist contractor for disposal if the pump has been
used to exhaust toxic or dangerous gases. The pump body and pump oil become
toxic.
(2) Dispose of pump oil in accordance with the section on cautions for disposal in
“1.2 Safety Data Sheet (SDS)”.
Caution