Ulvac GHD-101A - Table of Contents

Contents-1
Contents
0．Introduction ・・・・・・・・・・ 01
0.1 Before using the vacuum pump ・・・・・・・・・・ 01
0.2 Safety icons ・・・・・・・・・・ 02
0.3 Safety cautions ・・・・・・・・・・ 03
0.4 Receiving and storing the pump ・・・・・・・・・・ 05
0.4.1 Receiving the pump ・・・・・・・・・・ 05
0.4.2 Surroundings during storage, mounting, and operation ・・・・・・・ 05
0.5 Protective Equipment ・・・・・・・・・・ 06
1．Using the pump safely ・・・・・・・・・・ 1
1.1 Dangers unique to the pump, and safety measures ・・・・・・・ 1
1.1.1 Leakage of dangerous gases and substances・・・ 1
1.1.2 Electric shock ・・・・・・・・・・ 1
1.1.3 Bursting ・・・・・・・・・・ 2
1.1.4 High temperature ・・・・・・・・・・ 2
1.2 Safety data sheet (SDS) ・・・・・・・・・・ 2
2．Pump description ・・・・・・・・・・ 3
2.1 Performance details ・・・・・・・・・・ 3
2.2 Dimension drawings ・・・・・・・・・・ 4
3．Installation ・・・・・・・・・・ 5
3.1 Installation ・・・・・・・・・・ 5
3.2 Establishing an exhaust ・・・・・・・・・・ 6
3.3 Vacuum piping ・・・・・・・・・・ 7
3.4 Wiring ・・・・・・・・・・ 8
3.5
Fluctuations in the power supply voltage and frequency ・・・・・・・・・・ 11
DANGER
WARNING
WARNING
CAUTION