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４．Operation
4.1 Safety cautions
The pump is not pressure-resistant, and has an internal pressure limit of 0.03 MPa
(gauge pressure). Do not operate the pump with the exhaust blocked, or with the
passage of gas on the exhaust side obstructed. Under these conditions, the pump
pressure increases, and this may cause it to burst, oil to spray out of the oil level
gauge, or the motor to become overloaded.
(1) The pump oil deteriorates extremely quickly during semiconductor manufacturing
processes.
We recommend that the pump oil is first changed within the initial 10 days, and that
you then decide on a schedule for changing the oil after assessing the condition of
the pump oil.
(2) Change the pump oil frequently when large amounts of water, etc. are introduced
into the pump. If the oil is used after moisture has been introduced, the lubrication
properties of the oil will decrease and the pump parts will rust leading to pump
malfunctions.
(3) If chemical substances such as acids are introduced to the pump, immediately
change the pump oil as the pump can rust and no longer be usable even after just
being left for one night.
(4) If chemicals that reduce the pump oil’s lubrication properties are introduced,
change the pump oil as they may lead to the pump seizing.
(5) Operating the pump at high intake pressures of 1,000 Pa or more leads to the
pump oil being consumed quickly, and not enough pump oil being supplied to the
pump. Insufficient pump oil may lead to parts wearing quickly and seizures, etc.
Avoid operating continuously at high intake pressures as much as possible, and don’t
forget to add pump oil.
WARNING
Attention
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