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Ulvac GHD-101A - Safety Cautions

Ulvac GHD-101A
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-03-
0.3 Safety cautions
Ensure that only dry air or dry nitrogen enters this pump.
If the pump has been used to exhaust toxic gases, the pump itself, and the vacuum
pump oil (pump oil) will also be toxic. Be aware of this when performing maintenance.
Ensure that this pump is dismantled and repaired only by a repair technician. Failure
to follow this requirements may result in abnormal operation or electric shock.
Always ensure that the main power supply has been disconnected before inspecting
or repairing. Failure to do this may result in electric chocks or injuries due to the
pump suddenly starting.
Ensure that the equipment is earthed correctly. Installation of an earth leakage
breaker is recommended. Failure to earth the equipment correctly may result in
electric shock in the event of a malfunction or earth leakage.
Do not operate the pump with the exhaust blocked, or with the passage of gas on the
exhaust side obstructed. Under these conditions, the pump pressure increases, and
this may cause it to burst, oil to spray out of the oil level gauge, or the motor to
become overloaded.
The pump is not pressure-resistant, and has an internal pressure limit of 0.03 MPa
(gauge pressure).
Danger
Danger
Warning
Warning
Warning
Warning

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