Ulvac GHD-101A - Maintenance parts; 8.1 Maintenance parts list

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８．Maintenance parts
8.1 Maintenance parts list
Table 7 GHD-101 Maintenance parts list
Product name No.
Parts name
Q’TY
13
Air open valve spring
1
16 Oil seal _SC-13-25-7 1
17 Oil seal _VC-12-22-4 1
30
Check valve
1
36
Outlet valve spring
2
37
Outlet valve
2
49
O ring（Casing）
1
50 O ring _S-6 3
51 O ring _S-7 1
52 O ring _S-16 1
53 O ring _S-20 1
54 O ring _S-32 1
55 O ring _S-53 1
56 O ring _S-71 2
57 O ring _P-5 1
58 O ring _P-8 1
59 O ring _P-9 2
60 O ring _P-12 1
61 O ring _P-12.5 2
62 O ring _P-24 1
63 O ring _SS040 1
64 O ring _SS110 1
65 O ring _N-28 1
GHD-101
Maintenance kit A
77
O ring _P-20 1
18 1st Vane 2
19 2nd Vane 2
GHD-101
Maintenance kit B
39
Oil level gauge
1
(Note) Refer to the disassembly drawings for the relationship between parts.