-26-
Problem Cause Countermeasure
Ref.
Pressure doesn’t
drop
(5) The intake metal mesh is
clogged
(5) Remove the pipe from above
the intake and clean the metal
mesh
6.2
(6) Insufficient oil (6) Add the specified amount of
oil
6.3
(7) Oil has deteriorated (7) Change the oil 6.3
(8) The pipe connected to the
pump is leaking
(8) Find the leak with a leak
detector, etc. and stop it
5.1
(9) Not using the oil specified by
Ulvac
(9) After disassembling and
repairing the pump, replace with
the specified oil
6.3
(10) Oil is not circulating
Clogged oil holes in cover,
etc.
(10) Disassemble and repair
Clean the oil holes
6.2
Abnormal noise (1) Input power supply voltage
abnormal
(1) Adjust to rated voltage ±10% 3.5
(2) Defective motor (2) Replace the motor 6.2
(3) Foreign matter introduced
into pump
(3) Remove foreign matter,
dissemble and clean
6.2
(4) Insufficient oil (4) Add the specified amount of
oil
6.3
(5) Oil is not circulating
Clogged oil holes in cover,
etc.
(5) Disassemble and repair
Clean the oil holes 6.2
(6) Other pump internal parts
have broken
(6) Disassemble and repair
(replace the broken parts)
6.2
Pump surface is
abnormally hot
(room
temperature +
50ºC or more)
(1) Continuous operation with
high intake pressures
(1) The pump surface
temperature may reach 80
ºC if
operated continuously at high
intake pressures, but this is not a
problem
1.1
(2) Insufficient oil
(If the oil amount is low, the
pump cooling function may not
work well)
(2) Add the specified amount of
oil
6.3
(3) The intake gas is hot (3) Attach a cooling device such
as a gas cooler to the intake side
(4) Oil is not circulating
Clogged oil holes in cover,
etc.
(4) Disassemble and repair
Clean the oil holes
6.2
Lots of oil is
sprayed from the
exhaust
(1) The pump has more than the
specified amount of pump oil
(2) Remove oil until the specified
amount
6.2
(2) Continuous operation with
high intake pressures
(2) Attach an oil mist trap to the
exhaust side
4.8
Oil is leaking to
outside the pump
(1) Deterioration of the o-rings or
oil seals on the case or cover,
etc.
(1) Inspect and replace the
o-rings and seals
6.2
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