-01-
０．Introduction
0.1 Before using the vacuum pump
Thank you for your purchase of the vacuum pump.
After receiving the pump, check it against the details of the order, and verify that
there has been no damage in transit.
Always read this manual thoroughly before installation, operation, inspection, and
maintenance to ensure that the pump retains its performance over the long-term, and
ensure that you understand the safety cautions, pump specifications, and method of
operation.
Copying of any part of this manual for use by a third party is prohibited without
permission of Ulvac.
Warning
Attention
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