Documents are only to be used and distributed completely and unchanged. It is strictly the users’ responsibility to check carefully
the validity of this document with respect to his product.
page 2 of 24
No. 47800-2-02-5
➨ Danger! Immediate danger. Death or severe injuries as well as damage
to equipment and environment can occur.
☞ Warning! Possible danger. Severe injuries as well as damage to equip-
ment and environment can occur.
• Caution! Possible danger. Slight injuries as well as damage to equip-
ment and environment can occur.
Note. Disregarding of notes may cause damage to the product.
Caution! Hot surface!
Isolate equipment from mains before removing the cover.
NOTICE
Contents
Safety information! .....................................................................................................3
General information ............................................................................................................................3
Intended use ....................................................................................................................................... 3
Setting up and installing the equipment .............................................................................................3
Ambient conditions .............................................................................................................................4
Operating conditions ..........................................................................................................................5
Safety during operation ......................................................................................................................5
Maintenance and repair ......................................................................................................................7
Technical data .............................................................................................................8
Gas inlet temperatures ......................................................................................................................9
Wetted parts ......................................................................................................................................9
Pump parts ........................................................................................................................................9
Use and operation ....................................................................................................11
Installing in a vacuum system ..........................................................................................................11
During operation ...............................................................................................................................12
Attention: Important notes regarding the use of gas ballast .............................................................13
Shutdown .........................................................................................................................................13
Troubleshooting .......................................................................................................14
Replacing diaphragms and valves..........................................................................15
Cleaning and inspecting the pump heads .......................................................................................16
Replacing the diaphragm ................................................................................................................17
Assembling pump heads .................................................................................................................18
Replacing the device fuse ...............................................................................................................19
Notes on return to the factory .................................................................................20
Check sheet for repair..............................................................................................21
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