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Ulvac MD 4U NT - Gas Inlet Temperatures; Wetted Parts; Pump Parts

Ulvac MD 4U NT
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Documents are only to be used and distributed completely and unchanged. It is strictly the users’ responsibility to check carefully
the validity of this document with respect to his product.
page 9 of 24
No. 47800-2-02-5
Pump parts
Wetted parts
Gas inlet temperatures
Operating condition Inlet pressure
Permitted range of gas
temperatures at inlet
Continuous operation > 100 mbar (high gas load) +10°C to +40°C
Continuous operation < 100 mbar (low gas load) 0°C to +60°C
Short-time (< 5 minutes) < 100 mbar (low gas load) -10°C to +80°C
Components Wetted materials
Housing cover aluminium alloy (AlMgSi0.5 or AlSi12)
Head cover aluminium alloy (AlSi12)
Diaphragm clamping disc aluminium alloy (AlSi12)
Diaphragm FPM
Valves FPM
O-rings FPM
Connection tube aluminium alloy (AlMgSi0.5)
Small ange stainless steel
Silencer aluminium alloy / silicone
We reserve the right for technical modications without prior notice!
Position Component
1 Inlet
2 Outlet
3 Gas ballast valve
4 ON/OFF switch
5 Mains connection
6 Handle
7 Pump rating plate
8 Fan
9 Voltage changeover switch