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Ulvac MD 4U NT - Maintenance and Repair

Ulvac MD 4U NT
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Documents are only to be used and distributed completely and unchanged. It is strictly the users’ responsibility to check carefully
the validity of this document with respect to his product.
page 7 of 24
No. 47800-2-02-5
☞ Ensure that the pump cannot be operated accidentally. Never operate the
pump if covers or other parts of the pump are disassembled. Never operate
a defective or damaged pump.
☞ Attention: The pump might be contaminated with process chemicals which have
been pumped during operation. Ensure that the pump is decontaminated before
maintenance and take adequate precautions to protect people from the effects of
dangerous substances if contamination has occurred.
• Before starting maintenance vent the pump, isolate the pump and other compo-
nents from the vacuum system. Allow sufcient cooling of the pump.
Ensure that maintenance is done only by suitably trained and supervised techni-
cians. Ensure that the maintenance technician is familiar with the safety procedures
which relate to the products processed by the pumping system.
In order to comply with law (occupational, health and safety regulations, safety at
work law and regulations for environmental protection) vacuum pumps, components
and measuring instruments returned to the manufacturer can be repaired only when
certain procedures (see section ”Notes on return to the factory”) are followed.
Maintenance and repair
Wear parts have to be replaced regularly. In case of normal wear the lifetime of the
diaphragms and valves is > 10000 operating hours. Bearings have a typical durability
of 40000 h. Motor capacitors have a typical durability in the range of 10000 to 40000 h de-
pending strongly on the operation conditions like ambient temperature, humidity or load.
• Check every capacitor regularly by measuring its capacity and estimating its op-
eration time. Exchange old capacitors early enough to prevent a failure. If an
overaged motor capacitor fails it might get hot and even melt and may cause a
ame to form which could be dangerous for persons and equipment in the
vicinity. The capacitors have to be replaced by an electrician.
➨ Isolate equipment from mains and wait two minutes before starting mainte-
nance to allow the capacitors to discharge.