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General| Software | SmartSEM |
|---|---|
| Type | Field Emission Scanning Electron Microscope (FE-SEM) |
| Vacuum | High Vacuum, Variable Pressure |
| Electron Source | Field Emission Gun (FEG) |
| Magnification | 12x to 1, 000, 000x |
| Detectors | In-lens SE detector, BSE detector |
| Stage | 5-axis motorized stage |
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