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Zeiss Sigma 500 VP User Manual

Zeiss Sigma 500 VP
170 pages
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Instruction Manual
ZEISS SIGMA series
Field Emission Scanning Electron Microscope

Table of Contents

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Zeiss Sigma 500 VP Specifications

General IconGeneral
SoftwareSmartSEM
TypeField Emission Scanning Electron Microscope (FE-SEM)
VacuumHigh Vacuum, Variable Pressure
Electron SourceField Emission Gun (FEG)
Magnification12x to 1, 000, 000x
DetectorsIn-lens SE detector, BSE detector
Stage5-axis motorized stage

Summary

General Information

Explanation on Warnings and Additional Information

Explains signal words like DANGER, WARNING, CAUTION, NOTICE and their meanings.

Safety

General Safety Information

Outlines general safety instructions for operation and maintenance personnel.

Prevention of Hazards

Details potential hazards and recommended safety precautions to prevent them.

Warning Labels and Lights

Identifies and explains the warning labels and pictograms on the microscope system.

Safety Devices and Interlocks

Describes safety devices and interlocks that prevent injuries and property damage.

Product and Functional Description

Installation

Commissioning and First Operating Steps

Switching On the Microscope System

Describes the procedure for energizing and switching on the microscope system.

Starting the Software

Details the steps for starting the SmartSEM software and logging in.

Acquiring an Image

Explains the basic procedures for obtaining an image using the SE detector.

Finding Appropriate Detector Settings

Guides on selecting and setting up appropriate detectors for optimal imaging.

Working with Variable Pressure

Explains how to operate the microscope in Variable Pressure (VP) mode.

Shutting down the System

Outlines the procedures for finishing a work session and shutting down the system.

Performing an Emergency Shutdown

Details the steps for performing an emergency shutdown in critical situations.

Care and Maintenance

Troubleshooting

Decommissioning and Disposal

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