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General| Type | Field Emission Scanning Electron Microscope (FE-SEM) |
|---|---|
| Software | SmartSEM |
| Electron Optics | Gemini electron optics |
| Stage | 5-axes motorized stage |
| Detectors | In-lens SE detector |
| Electron Source | Schottky field emitter |
| Applications | Material science, nanotechnology |
| Vacuum System | variable pressure |
Identifies the specific product line of the manual.
Specifies the type of instrument covered by the manual.
Explains text conventions and link types used in the manual.
Details the meaning of warnings and additional information symbols.
Lists other relevant documents for the system.
Provides contact information for ZEISS support.
Defines the intended applications and usage of the microscope system.
Outlines general safety practices for system operation and maintenance.
Summarizes potential hazards and recommended safety precautions.
Details warning labels and pictograms used on the system.
Describes safety mechanisms and interlock systems.
Provides an overview of the microscope system and its main components.
Details the primary hardware components of the microscope.
Lists and describes optional parts and accessories for the microscope.
Explains the SmartSEM software and its user interface.
Lists requirements before starting system commissioning.
Details the procedure for powering on the microscope system.
Explains how to start the SmartSEM software.
Describes the process for obtaining an image using the SE detector.
Covers adjustments for gun parameters like mode and probe current.
Guides on selecting and setting up various microscope detectors.
Explains how to operate the microscope in Variable Pressure mode.
Details the usage of optional accessories like airlocks and plasma cleaners.
Provides procedures for safely shutting down the microscope system.
Describes steps for an immediate shutdown in emergency situations.
Highlights safety precautions for maintenance and cleaning tasks.
Outlines the recommended schedule for preventive maintenance.
Details maintenance tasks that can be performed by the user.
Describes general care and cleaning procedures for the system.
Addresses common issues related to the specimen chamber.
Covers troubleshooting steps for the electron optical column.
Provides guidance on troubleshooting the power circuit.
Lists troubleshooting tips for the various detectors.
Offers solutions for problems related to the PC.
Describes procedures for shutting down and securing the system.
Provides guidelines for safe transport and storage of the system.
Explains the proper disposal procedures for the system components.
Outlines requirements for decontamination before returning equipment.
Lists performance data for the Sigma 300 and Sigma 300 VP models.
Lists performance data for the Sigma 500 and Sigma 500 VP models.
Specifies the requirements for installing the microscope system.
Lists applicable standards and regulations for the product.
Lists necessary tools and accessories for the microscope.
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