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General| Type | Field Emission Scanning Electron Microscope (FE-SEM) |
|---|---|
| Software | SmartSEM |
| Electron Optics | Gemini electron optics |
| Stage | 5-axes motorized stage |
| Detectors | In-lens SE detector |
| Electron Source | Schottky field emitter |
| Applications | Material science, nanotechnology |
| Vacuum System | variable pressure |
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