64 Agilent 6400 Series Triple Quad LC/MS Concepts Guide
3 Agilent Triple Quadrupole MS and Sensitivity
Pumping system
6410 or 6420 Triple Quadrupole
A single three-stage turbo pump is used for the entire vacuum
system. This is achieved by partitioning the turbo pump to
create the multiple vacuum stages. A second turbo pump is not
needed for the 6410 or for the 6420. This pump is backed by a
single roughing (mechanical) pump (Figure 33).
Figure 32 6460 Triple Quadrupole pumping system
Figure 33 6410/6420 Triple Quadrupole pumping system