Module 8
Capacitance Measurement
8-12
Calibration
Opens dialog box to start
correction/compensation.
CMU Calibration
Open the Calibration window and click the CMU Calibration tab to perform the CMU calibration.
At first, open the measurement terminals for CMUH and CMUL, and perform the Phase
Compensation by clicking the Measure… button.
After the phase compensation, perform the Open Correction by clicking the Measure… button.
If you can make the short condition, short the measurement terminals, and perform the Short
Correction.
If you have the load standard, connect it, and perform the Load Correction.
Note:
If you use the calibration standard, define the reference data before starting the calibration. It must
be defined in the Reference Standard Value on the Advanced Options for CMU Calibration window.
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