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Dimensional Drawings: page 32
Specifi cation Mass Meter Description
Accuracy ± (0.8% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
High Accuracy Option ± (0.4% of Reading + 0.2% of Full Scale)
At calibration conditions after tare
Accuracy: Bi-directional
Meters Only
± (0.8% of reading + 0.2% of total span
positive full scale to negative full scale)
At calibration conditions after tare
Repeatability ± 0.2% Full Scale
Operating Range 1% to 100% Full Scale Measure
Typical Response Time 10 Milliseconds (Adjustable)
Standard Conditions (STP) 25ºC & 14.696PSIA Mass Reference Conditions
Operating Temperature −10 to +50 ºCelsius
Zero Shift 0.02% Full Scale / ºCelsius / Atm
Span Shift 0.02% Full Scale / ºCelsius / Atm
Humidity Range 0 to 100% Non–Condensing
Measurable Flow Rate 128% Full Scale
Maximum Pressure 145 PSIG
Output Signal Digital
Mass Flow, Volume Flow,
Pressure & Temperature
RS-232 or RS-485 Serial or
PROFIBUS
1
Output Signal Analog Mass Flow 0-5Vdc
Optional Output Signal
Secondary Analog
Mass Flow, Volumetric Flow
Pressure or Temperature
0-5 Vdc or 0-10Vdc
or 4-20mA
Electrical Connections 8 Pin Mini-DIN or DB-15
Supply Voltage 7 to 30 Vdc (15-30Vdc for 4-20mA outputs)
Supply Current 0.035Amp (+ output current on 4-20mA)
Mounting Attitude Sensitivity 0% Tare after installation
Warm-up Time < 1 Second
Wetted Materials
2
303 & 302 Stainless Steel, Viton®, Silicone RTV (Rubber), Glass Reinforced
Nylon, Aluminum.
1. If selecting PROFIBUS no analog signal is available. PROFIBUS units do not have the display. See
PROFIBUS specifi cations for PROFIBUS supply voltages and currents.
2. If your application demands a different material, please contact Application Assistance for available options.
The following specifi cations are for the standard confi guration of the Alicat product as shipped from the
factory. There are many low-cost customization options available.
Full Scale Flow Mass Meter
Mechanical
Dimensions
Process
Connections
1
Pressure Drop
2
(PSID)
0.5SCCM to 1SCCM
3.9”H x 2.4”W x 1.1”D
M-5 (10-32) Female
Thread*
1.0
2SCCM to 50SCCM 1.0
Units ≤50SCCM F.S. are shipped with M-5 (10-32) Male Buna-N O-ring face seal to 1/8” Female NPT fi ttings.
These adaptor fi ttings were selected for customer convenience in process connection. It should be noted that
the 1/8” Female NPT introduces additional dead volume. To minimize dead volume, please see Accessories for
the 10-32 Male to 1/8”OD compression fi tting.
1. Compatible with Beswick®, Swagelok® tube, Parker®, face seal, push connect and compression adapter
fi ttings.
2. Venting to atmosphere. Lower Pressure Drops Available, please contact Application Assistance.
Mechanical Specifi cations
Technical Data for Micro-Flow and Ultra-Low Flow Mass Flow Meters
0 to 0.5SCCM Full Scale through 0 to 50SCCM Full Scale
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