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EL-FLOW Base Series
BRONKHORST EL-FLOW Base Series User Manual
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I
n
s
t
r
u
c
t
i
o
n
m
a
n
u
a
l
EL
-
FLOW
Base
series
Mass Flow Controllers
D
o
c
.
n
o.
:
9
.
1
7
.
0
6
1
N
D
a
t
e
:
08
-
0
4
-
2019
ATTENTION
Please read this instruct
ion manual carefully
before installing an
d operating the i
nstrument.
Not following
the guidelines co
uld result in
personal inju
ry and/or damage to t
he equipment
.
2
Table of Contents
Table of Contents
3
General Product Information
5
Introduction
5
Intended Use
5
Symbols
5
Product Support References
5
Warranty
6
Product Description
6
General Description
6
Model Key
7
Seals
7
Calibration
8
Features
8
Operating Principles
9
Thermal Gas Flow Sensor Principle
9
Bypass Principle
9
Solenoid Valve Principle
10
Maintenance
10
Installation Instructions
11
Introduction
11
Unpacking and Inspection
11
Rated Pressure Test Inspection
11
Instrument Mounting
11
Fluidic Connections
12
In-Line Filter Usage
12
Piping Requirements
12
Electrical Connections
13
Interface
13
Power Supply
13
Power and Warm-Up
13
Pressure Supply / Start-Up
13
System Purging
14
Zeroing
14
Basic Operation
15
General
15
Analog Operation
15
Digital Communication Protocol Detection (Flow-BUS RS232 or MODBUS RS485)
16
Basic RS232 Flowbus Operation
17
Modbus RS485 Operation
18
Modbus Termination
18
Slave Address, Baud Rate and Parity Setup
19
Implementation Class
23
Response Time
23
Supported Modbus Functions
23
Available Parameters
24
Push-Button Operation
26
Micro-Switch Use for Reading/Changing Control Mode
27
Read Control Mode
27
Change Control Mode
27
LED Indications
28
Basic Parameters and Properties
29
Introduction
29
Basic Parameters
30
Advanced Operation
31
Reading and Changing Instrument Parameters
31
Introduction
31
Identification
31
Fluid Information
32
Auto Zeroing
32
Controller Response Adjustment
33
Changing Default Control Mode
34
Display Filter
35
Disabling Micro Switch
35
Using Other Gasses than Specified
36
Software for Conversion Factor Calculation
36
Maximum Pressure Drop
36
Troubleshooting
37
General
37
LED Indications
37
Troubleshooting Summary General
37
Removal and Return Instructions
39
Service
40
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BRONKHORST EL-FLOW Base Series Specifications
General
Brand
BRONKHORST
Model
EL-FLOW Base Series
Category
Controller
Language
English
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