BRONKHORST EL-FLOW Base Series - Table of Contents

BRONKHORST®
9.17.061 EL-FLOW Base Series Mass Flow Controllers Page 3
TABLE OF CONTENTS
Contents
1 General Product Information ........................................................................................................... 5
1.1 Introduction ....................................................................................................................................................... 5
1.2 Intended Use ...................................................................................................................................................... 5
1.3 Symbols .............................................................................................................................................................. 5
1.4 Product Support References .............................................................................................................................. 5
1.5 Warranty ............................................................................................................................................................ 6
1.6 Product Description ........................................................................................................................................... 6
1.6.1 General Description .................................................................................................................................... 6
1.6.2 Model Key ................................................................................................................................................... 7
1.6.3 Seals ............................................................................................................................................................ 7
1.6.4 Calibration ................................................................................................................................................... 8
1.6.5 Features ...................................................................................................................................................... 8
1.7 Operating Principles ........................................................................................................................................... 9
1.7.1 Thermal Gas Flow Sensor Principle ............................................................................................................. 9
1.7.2 Bypass Principle .......................................................................................................................................... 9
1.7.3 Solenoid Valve Principle ............................................................................................................................ 10
1.8 Maintenance .................................................................................................................................................... 10
2 Installation Instructions ................................................................................................................. 11
2.1 Introduction ..................................................................................................................................................... 11
2.2 Unpacking and inspection ................................................................................................................................ 11
2.3 Rated pressure test inspection ........................................................................................................................ 11
2.4 Instrument mounting ....................................................................................................................................... 11
2.5 Fluidic connections .......................................................................................................................................... 12
2.6 In-line filter usage ............................................................................................................................................ 12
2.7 Piping requirements ........................................................................................................................................ 12
2.8 Electrical connections ...................................................................................................................................... 13
2.8.1 Interface .................................................................................................................................................... 13
2.8.2 Power Supply ............................................................................................................................................ 13
2.9 Power and warm-up ........................................................................................................................................ 13
2.10 Pressure supply / Start-up ............................................................................................................................... 13
2.11 System purging ................................................................................................................................................ 14
2.12 Zeroing ............................................................................................................................................................. 14
3 Basic Operation ............................................................................................................................. 15
3.1 General ............................................................................................................................................................ 15
3.2 Analog operation ............................................................................................................................................. 15
3.3 Digital communication protocol detection (Flow-BUS RS232 or MODBUS RS485) ......................................... 16
3.4 Basic RS232 Flowbus operation ....................................................................................................................... 17
3.5 Modbus RS485 operation ................................................................................................................................ 18
3.5.1 Modbus termination ................................................................................................................................. 18
3.5.2 Slave address, baud rate and parity setup ................................................................................................ 19
3.5.3 Implementation class ................................................................................................................................ 23
3.5.4 Response time ........................................................................................................................................... 23
3.5.5 Supported Modbus functions ................................................................................................................... 23
3.5.6 Available parameters ................................................................................................................................ 24
3.6 Push-button operation .................................................................................................................................... 26
3.7 Micro-switch use for reading/changing control mode .................................................................................... 27
3.7.1 Read control mode ................................................................................................................................... 27
3.7.2 Change control mode: .............................................................................................................................. 27
3.8 LED indications ................................................................................................................................................. 28
3.9 Basic Parameters and Properties ..................................................................................................................... 29
3.9.1 Introduction .............................................................................................................................................. 29
3.9.2 Basic Parameters ....................................................................................................................................... 30
4 Advanced Operation ..................................................................................................................... 31
4.1 Reading and Changing Instrument Parameters ............................................................................................... 31