BRONKHORST EL-FLOW Base Series - Page 38

BRONKHORST®
Page 38 EL-FLOW Base Series Mass Flow Controllers 9.17.061
Symptom
Possible cause
Action
Small flow at zero setpoint
Valve leaks due to damaged plunger or dirt in
orifice
6a) clean orifice and/or, when replacing
plunger assembly, see ‘1e’
Pressure too high or much too low
6b) apply correct pressure
High flow at zero setpoint
Damaged diaphragm (only applicable to
valves with membrane)
7a) replace membrane seal