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Brooks SLA5860 User Manual

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Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Brooks
®
Digital MFC's & MFM's
Brooks
®
SLA5800 Series
Elastomer Sealed, Digital,
Thermal Mass Flow Meters and Controllers
Model SLA5850
with RS485 Communications
Model SLA5850
with DeviceNet
®
Communications
Model SLA5850
with Profibus
®
Communications
Model SLA5851
with EtherCAT
®
Communications

Table of Contents

Questions and Answers:

Brooks SLA5860 Specifications

General IconGeneral
BrandBrooks
ModelSLA5860
CategoryMeasuring Instruments
LanguageEnglish

Summary

Section 1 Introduction

Specifications

Presents technical specifications, flow ranges, pressure ratings, and performance data.

RS485 Communications

Describes the RS485 communication protocol, features, and pinouts.

Profibus Communications

Details the Profibus communication option, features, and pinouts.

DeviceNet Communications

Explains the DeviceNet communication capability, features, and pinouts.

EtherCAT Communications

Introduces the EtherCAT communication interface and its features.

Section 2 Installation

2-9 Installation

Gives general installation procedures and cautions for MFC/MFM mounting.

Special Considerations for High Pressure Installations

Offers guidance on installing devices in high-pressure applications and startup.

Special Considerations to be taken when installing the SLA5853 MFC

Highlights specific installation considerations for the SLA5853 MFC model.

2-10 Electrical Interface

Explains the electrical interface, pin connections, and signal types for analog I/O.

2-11 Operation Check Procedure (Analog I/O)

Details the steps for checking the operation of the instrument with analog I/O.

2-12 Operation Check Procedure (Digital I/O)

Outlines the procedure for checking the operation of the instrument with digital I/O.

Section 3 Operation

3-2 Theory of Operation for Flow Measurement

Explains the principle of thermal mass flow measurement using the sensor and restrictor.

3-4 Analog I/O Mode of Operation

Describes the analog I/O options, setpoint input, flow signal output, and valve override.

Zeroing the MFC

Provides instructions on how to perform the self-zero function for the MFC.

3-5 Communications Features

Introduces the various communication protocols available for the digital series.

3-5-1 RS485 Communications Features (Analog versions only)

Details the specific features and baud rates for RS485 communication.

Section 4 Maintenance & Troubleshooting

4-1-1 Troubleshooting Analog or Digital

Provides guidance to diagnose MFC problems in gas distribution systems and answers FAQs.

Troubleshooting Table

Lists common troubles, possible causes, and corrective actions for MFC/MFM issues.

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