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Brooks Smart Series User Manual
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2
Table of Contents
Table of Contents
5
Section 1:Introduction
6
Purpose
6
How to Use this Manual
6
Description
7
Table 1-1: Flow Ranges Per Model
7
Section 2: Installation
10
General
10
Receipt of Equipment
10
Recommended Storage Practice
11
Return Shipment
11
Gas Connections
11
Mechanical Installation
12
IN-LINE Filter
12
Electrical Interfacing
13
Table 2-1: Electrical Interfacing. Smart TMF
13
Figure 2-1: Open Collector
14
Digital Communication
15
Figure 2-2: P.C. Boards with the Locations of Jumper Switches Note: Switch Number 1 Is the Switch at the Bottom
15
Table 2-2: Dipswitch Settings
16
Interconnection
17
Figure 2-3: RS-232 Interconnection of TMF and PC
17
Figure 2-4: RS-485 Multidrop Interconnection Tmfs and PC
17
Figure 2-5: TMF/C to Read-Out Cable
18
Figure 2-6: TMF/C Read-Out and Pc
18
Table 2-3: Electrical Interfacing. Smart TMF Cable
19
Section 3: Operation
20
Operating Procedure
20
Zero Adjustment
20
Calibration Procedure
20
Section 4: Maintenance
21
General
21
Troubleshooting and System Checks
21
Table 4-1: Troubleshooting
23
Cleaning Procedures
24
Calibration Procedure
24
Valve (Dis)Assembly Procedure
24
Section 5: Specification
25
Table 5-1: Flow Ranges and Pressure Ratings
26
Appendix A: Gas Conversion Tables
29
Appendix B: Dimensional Drawings
33
Appendix C:translation of CE Marking Electrical Installation Instructions
35
Appendix D: Important Safety Instructions
40
Appendix E: Modellist
45
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Brooks Smart Series Specifications
General
Category
Measuring Instruments
Communication Protocol
RS-485, Modbus
Power Supply
24 VDC
Operating Temperature
0 to 50°C
Storage Temperature
-20 to 70°C
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