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Brooks 5850S - User Manual
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1
Installation and Operation Manual
X-DPT
-Profibus-Interface-eng
PN 541-C-068-AAG
November
, 2008
Profibus-DP Interface
for use with
Brooks
®
Smart Mass
Flow Meters
models 5860S, 5861S, 5863S, 5864S &
Mass Flow Controllers
models 5850S, 5851S, 5853S
2
Table of Contents
Main Page
Default Chapter
4
Table of Contents
4
1 Introduction
6
How to Use this Manual
6
Related Documents
6
Definition of Terms
7
Terminology
7
Number Representations and Formats
8
2 Product Overview
9
General
9
Receipt of Equipment
9
Recommended Storage Practice
10
Return Shipment
10
Gas Connectionsl
10
The Brooks Smart Mass Flow Products
11
Table 2-1: Brooks Smart Mass Flow Meters and Controllers
11
Profibus on the Smart TMF Series
12
3 Installation
14
Electrical Interfacing
14
General
14
Main Connector
14
Table 3-1: Smart TMF Main Connector Pin Layout
15
Figure 3-1: Smart TMF Main 15-Pin Male Sub-D Connector - Pin Numbering
15
Additional Profibus Connector (5800 Series)
16
Table 3-2: Smart TMF Profibus-DP Network Connector Pin Layout
16
Figure 3-2: Profibus 9-Pin Female Sub-D Connector - Pin Numbering
16
Main Connector (MF Series)
17
Figure 3-3: MF Profibus Main Power Connection
17
Profibus Connector (MF Series)
18
Station Address Selection
18
Figure 3-4: Pinnumbering
18
Figure 3-5: Smart Mass Flow Meter/Controller - Outlet View
18
Zero Pushbutton
19
Supported Baud Rates
19
Profibus Network Wiring
20
Profibus Network Wiring Requirements
20
Supported Baud Rate Values
20
Table 3-4: Profibus Cable Parameters
20
Figure 3-6: Profibus Line Termination Configuration
21
Figure 3-7: Recommended TEE and Terminator Resistor
21
Line Termination Requirements
21
Special Requirements for High-Speed Communication
21
Figure 3-8: High-Speed Communication Inductors
22
4 Slave Configuration
23
Introduction
23
Illustration of the Profibus-DP Communication Procedure
23
Parameterization of the Salve (MFC)
23
Configuration of the Slave
29
Diagnostic
31
Device Diagnostic Message
31
Run-Time Message Errors
31
Table 5-1: Diagnostics Message, Extended Data Section Layout
31
Table 5-2: Diagnostics: Run-Time Message Error Bits
31
Fatal System Errors
32
Primary Non-Fatal System Errors
32
Table 5-3: Diagnostics: Fatal System Error Bits
32
Table 5-4: Diagnostics: Primary Non-Fatal System Error/Alarm Bits
33
Secondary Non-Fatal System Errors
34
Non-Fatal Ambient Errors
34
Table 5-5: Diagnostics: Secondary Non-Fatal System Error/Alarm Bits
34
Table 5-6: Diagnostics: Non-Fatal Ambient Error/Alarm Bits
34
Data Exchange Mode
35
Example of the Profibus-DP Communication Procedure
38
5 Modellisting
39
Appendix A Profibus-Dp Message Services
47
Global Control Commands
47
Fail-Safe Option
47
Sync/Unsync Option
47
Appendix B Ieee 754 Floating Point Format
49
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Brooks 5850S Specifications
General
Brand
Brooks
Model
5850S
Category
Measuring Instruments
Language
English
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