11
Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
2.6 THE BROOKS SMART MASS FLOW PRODUCTS
The Brooks Smart Mass Flow Meters, models 5860/MF60, 5861/MF61, 5863/
MF63 and 5864/MF64 measure gas flow accurately. The heart of the system, is
the thermal mass flow sensor which produces an electrical output signal as a
function of flow rate. In addition the Brooks Smart Mass Flow Controllers,
models 5850/MF50, 5851/MF51 and 5853/MF53 are equipped with an electro-
mechanical valve, allowing them to control gas flows. The flow ranges per model
are listed in Table 2-1 below.
Table 2-1: Brooks Smart Mass Flow Meters and Controllers.
Brooks Smart Mass Flow Products
Mass Flow Mass Flow
Controller Meter
Model Model Min. full scale Max. full scale Unit*
5850/MF50 5860/MF60 0.003 30 l
n
/min
5851/MF51 5861/MF61 20 100 l
n
/min
5853/MF53 5863/MF63 100 2500/1000 l
n
/min
MF64 18 2160 m
n
3
/hr
* The index n refers to ‘normal’ conditions, i.e. 0°C, 1013.25 mbar.
Standard features of the Brooks Smart series include:
• High accuracy and repeatability.
• Selectable analogue setpoint input/flow rate output signals.
• Adaptive signal filtering.
• Fast response to setpoint changes.
• Programmable softstart ramp rate.
• Powerful adaptive control to provide optimal control behaviour and response
under varying process conditions.
• Programmable valve override function.
• Programmable totalizer function.
• High-Low flow alarms.
• Continuous self diagnostics to ensure system integrity as well as signal
diagnostics to ensure process integrity.
• Programmable alarm signalling options.
• Selectable communication protocol options.
Flow Ranges (N
2
)
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