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Brooks SLA585 User Manual

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Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Brooks
®
Digital MFC's & MFM's
Brooks
®
SLA5850, SLA5851, SLA5853
Mass Flow Controllers Models
and Models SLA5860, SLA5861, SLA5863
Mass Flow Meters
Model SLA5850S
Analog I/O MFC
with RS-485
Model SLA5850S
Analog I/O MFC
with RS-485
Elastomer Downport
Model SLA5853S
Analog I/O MFC
with RS-485
Model SLA5850D
Digital I/O
DeviceNet
TM
MFC
with Coplanar Valve
Model SLA5850F
Digital I/O
FOUNDATION
Fieldbus MFC
with Coplanar Valve

Table of Contents

Questions and Answers:

Brooks SLA585 Specifications

General IconGeneral
BrandBrooks
ModelSLA585
CategoryMeasuring Instruments
LanguageEnglish

Summary

Section 1: Introduction to Brooks Digital MFC's & MFM's

Specifications

Details performance characteristics, ratings, and flow ranges for the SLA5800 series.

Section 2: Installation

Electrical Interface and Wiring

Details electrical connections, I/O signals, wiring diagrams, and communication interfaces.

Operation Checkout Procedures

Steps for verifying proper operation of analog and digital I/O configurations.

Section 3: Operation

Analog I/O Configuration

Details analog I/O setpoint, flow signals, valve override, calibration, and zeroing functions.

Alarms and Diagnostics

Explains alarms, warnings, diagnostic codes, and safe mode behavior.

Section 4: Maintenance & Troubleshooting

Troubleshooting Guide

Provides suggestions for diagnosing common MFC/MFM issues.

System Checks and Bench Troubleshooting

Outlines system checks, bench troubleshooting procedures, and warnings.

Section A: Essential Instructions

Warranty, Service, and Support

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