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Brooks SLA585 - Model SLA5863 Analog I;O MFM with Flanges

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1-15
Section 1 Introduction
Brooks
®
Digital MFC's & MFM's
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Figure 1-13 Model SLA5863D Digital I/O Devicenet MFM
Figure 1-14 Model SLA5863 Analog I/O MFM with Flanges

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