Brooks SLA585 - Model SLA5860 S Analog I;O MFM with RS-485

1-14
Brooks
®
Digital MFC's & MFM's
Section 1 Introduction
Installation and Operation Manual
X-TMF-SLA5800-MFC-eng
Part Number: 541B027AAG
April, 2013
Figure 1-12 Model SLA5861F Digital I/O FOUNDATION Fieldbus MFM
Figure 1-11 Model SLA5860S Analog I/O MFM with RS-485